en Research Paper Research Paper <span style="font-size:12pt"><span data-darkreader-inline-bgcolor="" data-darkreader-inline-bgimage="" style="background: white; --darkreader-inline-bgcolor: #181a1b; --darkreader-inline-bgimage: none;"><span style="line-height:200%"><span new="" roman="" style="font-family:" times=""><span lang="EN-US" style="font-size:11.0pt"><span data-darkreader-inline-bgcolor="" data-darkreader-inline-bgimage="" style="background: yellow; --darkreader-inline-bgcolor: #999900; --darkreader-inline-bgimage: none;"><span style="line-height:200%"><span data-darkreader-inline-bgcolor="" style="background-color: rgb(255, 255, 255); --darkreader-inline-bgcolor: #181a1b;">This work aims to prepare and study amorphous carbon nitride (CNx) films. Films were deposited by reactive magnetron radiofrequency (RF) sputtering from graphite target in argon and nitrogen mixture discharge at room temperature. </span><span data-darkreader-inline-color="" style="color: black; --darkreader-inline-color: #e8e6e3;"><span data-darkreader-inline-bgcolor="" style="background-color: rgb(255, 255, 255); --darkreader-inline-bgcolor: #181a1b;">The ratio of the gas flow rate was varied from 0.1 to 1. Deposited films were found to be amorphous. Highest Nitrogen concentration achieved was 42 atomic percent which is very rare and therefore, the highest nitrogen to carbon atomic ratio was</span></span><span data-darkreader-inline-bgcolor="" style="background-color: rgb(255, 255, 255); --darkreader-inline-bgcolor: #181a1b;"> 0.76. The incorporation of nitrogen promotes the clustering of diamond-like sites at the expense of graphitic ones leading to the decrease of the disorder. The film surface becomes rough with increasing nitrogen concentration. Films are optically transparent in the 200-900 nm wavelength range with a wide gap varying between 3.59 and 3.63 eV. There is an increase in resistivity from </span><span data-darkreader-inline-color="" style="color: black; --darkreader-inline-color: #e8e6e3;"><span data-darkreader-inline-bgcolor="" style="background-color: rgb(255, 255, 255); --darkreader-inline-bgcolor: #181a1b;">15 to 87.4 x10</span>^{<span data-darkreader-inline-bgcolor="" style="background-color: rgb(255, 255, 255); --darkreader-inline-bgcolor: #181a1b;">-3</span>}</span></span></span></span><m:omath><span lang="EN-US" style="font-size:11.0pt"><span data-darkreader-inline-bgcolor="" data-darkreader-inline-bgimage="" style="background: yellow; --darkreader-inline-bgcolor: #999900; --darkreader-inline-bgimage: none;"><span style="line-height:200%"><span data-darkreader-inline-color="" style="color: black; --darkreader-inline-color: #e8e6e3;"><m:r><m:rpr><m:scr m:val="roman"><m:sty m:val="p"></m:sty></m:scr></m:rpr><span data-darkreader-inline-bgcolor="" style="background-color: rgb(255, 255, 255); --darkreader-inline-bgcolor: #181a1b;">&Omega;</span></m:r></span></span></span></span><span lang="EN-US" style="font-size:11.0pt"><span data-darkreader-inline-bgcolor="" data-darkreader-inline-bgimage="" style="background: yellow; --darkreader-inline-bgcolor: #999900; --darkreader-inline-bgimage: none;"><span style="line-height:200%"><span cambria="" math="" style="font-family:"><span data-darkreader-inline-color="" style="color: black; --darkreader-inline-color: #e8e6e3;"><m:r><m:rpr><m:scr m:val="roman"><m:sty m:val="p"></m:sty></m:scr></m:rpr><span data-darkreader-inline-bgcolor="" style="background-color: rgb(255, 255, 255); --darkreader-inline-bgcolor: #181a1b;">.cm</span></m:r></span></span></span></span></span></m:omath><span data-darkreader-inline-bgcolor="" style="background-color: rgb(255, 255, 255); --darkreader-inline-bgcolor: #181a1b;">&nbsp;</span><span lang="EN-US" style="font-size:11.0pt"><span data-darkreader-inline-bgcolor="" data-darkreader-inline-bgimage="" style="background: yellow; --darkreader-inline-bgcolor: #999900; --darkreader-inline-bgimage: none;"><span style="line-height:200%"><span data-darkreader-inline-bgcolor="" style="background-color: rgb(255, 255, 255); --darkreader-inline-bgcolor: #181a1b;">for a</span><b><span data-darkreader-inline-bgcolor="" style="background-color: rgb(255, 255, 255); --darkreader-inline-bgcolor: #181a1b;">-</span></b><span data-darkreader-inline-bgcolor="" style="background-color: rgb(255, 255, 255); --darkreader-inline-bgcolor: #181a1b;">CN</span><i>_{<span data-darkreader-inline-bgcolor="" style="background-color: rgb(255, 255, 255); --darkreader-inline-bgcolor: #181a1b;">x</span>}</i><span data-darkreader-inline-bgcolor="" style="background-color: rgb(255, 255, 255); --darkreader-inline-bgcolor: #181a1b;"> thin films for 0.1< R</span>_{<span data-darkreader-inline-bgcolor="" style="background-color: rgb(255, 255, 255); --darkreader-inline-bgcolor: #181a1b;">F</span>}<span data-darkreader-inline-bgcolor="" style="background-color: rgb(255, 255, 255); --darkreader-inline-bgcolor: #181a1b;"> < 0.8 and a less decrease for &nbsp;&nbsp;R</span>_{<span data-darkreader-inline-bgcolor="" style="background-color: rgb(255, 255, 255); --darkreader-inline-bgcolor: #181a1b;">F</span>}<span data-darkreader-inline-bgcolor="" style="background-color: rgb(255, 255, 255); --darkreader-inline-bgcolor: #181a1b;"> </span></span></span></span><span lang="EN-US" style="font-size:11.0pt"><span data-darkreader-inline-bgcolor="" data-darkreader-inline-bgimage="" style="background: yellow; --darkreader-inline-bgcolor: #999900; --darkreader-inline-bgimage: none;"><span style="line-height:200%"><span style="font-family:Symbol"><span data-darkreader-inline-bgcolor="" style="background-color: rgb(255, 255, 255); --darkreader-inline-bgcolor: #181a1b;">></span></span></span></span></span><span lang="EN-US" style="font-size:11.0pt"><span data-darkreader-inline-bgcolor="" data-darkreader-inline-bgimage="" style="background: yellow; --darkreader-inline-bgcolor: #999900; --darkreader-inline-bgimage: none;"><span style="line-height:200%"><span data-darkreader-inline-bgcolor="" style="background-color: rgb(255, 255, 255); --darkreader-inline-bgcolor: #181a1b;"> 0.8. Pore size increases in the films, but has little influence on band gaps. On the other hand, increasing the pore size reduces electrical interaction between particles by increasing resistivity.</span></span></span></span><span lang="EN-US" style="font-size:11.0pt"><span style="line-height:200%"></span></span></span></span></span></span> carbon nitride,structural properties,optical properties reactive magnetron RF sputtering 1 13 http://ijmse.iust.ac.ir/browse.php?a_code=A-10-4471-1&slc_lang=en&sid=1 Nadjet AKLOUCHE nadjet.aklouche@univ-setif.dz 1800319475328460015838 1800319475328460015838 Yes Laboratoire d’Elaboration de nouveaux matériaux et leurs caractérisations, Université Ferhat Abbas Sétif 1, Sétif, 19000, Algeria MOSBAH AMMAR ammar.mosbah@univ-setif.dz 1800319475328460015839 1800319475328460015839 No Laboratoire d'Etude des surfaces et interfaces des matériaux solides, Université Ferhat Abbas Sétif 1, Sétif, 19000, Algeria